◆ Our Research Topic

In our laboratory, we aim for "developement of innovative plasma source and its industrial application".
We are developing outstanding original plasma equipments for various industrial applications.
We are also investigating to elucidate various invisible phenomena occurring in the plasma in order to use various plasmas.

a. Developement of New Process Plasma Source

・ Meter-scale atmospheric-pressure microwave plasma for large-area surface treatment

・ Microwave in-liquid plasma for decomposition, material synthesis

b. Plasma Diagnostics

・ Measurement of high energetic particles in DC-VHF magnetron sputtering plasma

・ Chemical reaction in interaction between liquid and plasma

c. Plasma Process

・ ITO film synthesis by DC-VHF magnetrn sputtering

・ Surcace modification of film substrate and synthesis of barrier film